Micro-blasting has established itself among the mainstream machining processes for difficult-to-cut workpieces like glasses, carbides, ceramics, etc., by using abrasive particles. Initially, during micro-blasting process non-machined areas are covered by protective mask. Today, either mask fabrication practice or micro-blasting process, none is secretive in the area of micro-manufacturing, but in the previous work, those processes were well suited and optimized for producing micro-features on planar workpieces. However, the demand for micro-features on 3D freeform substrate in MEMs and lab-on-a-chip devices imposes development of more refined non-planar micro-manufacturing techniques. In these concerns, this research focused on devising an appropriate photoresist mask required by micro-AJM processes on surface of a 3D freeform workpiece. The author investigated fundamental erosion mechanisms based on the SU-8 mask properties. Under optimal settings, the mask hardness and surface roughness were 25.04 HV and 1.14µm respectively. Through micro-AJM process, the engraved micro-features size on surface of 3D freeform workpiece was 447.1 µm- width and 11.6 µm- depth.
Author Jean Bosco Byiringiro
Product type Paperback
Dimension 8.66 x 5.91 inches
Optimal Conditions of SU-8 Mask for Micro-Abrasive Jet Machining of 3D Freeform Brittle Materials
Jean Bosco Byiringiro
Delivery date: between Monday, June 8 and Wednesday, June 10
This discussion is intended to exchange information between customers. If your question answered within 48 hours, the answer gives you an expert of Dodax.